1. This instrument will used to microscopic morphology analysis of sample with quality of from nm level to pm by high resolution and high speed surface imaging capability. 2. System must be scanned by using software controlled based on stick slip motion. 3. System must use a flexure-based XY piezo scanner to effectively decouple crosstalk between X, Y and Z scan direction with X LVDT, Y LVDT and Z LVDT sensors. Scanners based on piezo tubes are not acceptable. 4. System must be installed by enclosure without acoustic hood. 5. System must be supported multi-sample points and multi-site automated imaging. Must include programming of sample imaging locations, automated AC (tapping) mode imaging parameter optimization, and automated engage and withdrawal. 6. The system must be supported all standard imaging and caracterization measurement modes followings including contact mode, ART PFM; Dual AC, Dual AC Resonance Tracking (DART), Electric force microscopy (EFM), Force curves; Force mapping mode (force volume), Force modulation, Frequency modulation, Kelvin probe force microscopy (KPFM), Lateral force mode (LFM), Loss tangent imaging, Magnetic force microscopy (MFM), Nanolithography and nanomanipulation, Phase imaging, piezoresponse force microscopy (PFM), Switching spectroscopy PFM, Tapping mode (AC mode), Tapping mode with digital Q control, Vector PFM, Scanning tunneling microscopy(SPM), Nanoscale time dependent dielectric breakdown, Conductive AFM(CAFM) with ORCA and Eclipse Mode 7. The system must include motors for automatically approaching tip, and engaging the sample.

○ 표면 물리적 특성 측정 - 다양한 모드 구현을 통한 각종 물리적 특성 측정 - Contact mode, Lateral force mode(LFM), Nanolithography and nanomanipulation, Phase imaging - Tapping mode(AC mode), Tapping mode with Q-control, Dual AC - Force curves, Force mapping mode (force volume), Force modulation, Frequency modulation - Loss tangent imaging, Electric force microscopy(EFM), Kelvin prove force microscopy(KPFM) - Magnetic force microscopy(MFM), Dual AC Resonance Tracking(DART), DART PFM - Piezoresponse force microscopy(PFM), Switching spectroscopy PFM, Vector PFM, Dual gain conductive AFM with Elipse mode

거칠기 뿐만 아니라 다양한 모드를 구현 가능한 AFM(EFM, MFM, KPFM, DART 등)