박막의 두께를 측정하는 장비로서 0.38Å의 resolution을 갖는다. - Main Body - Computer(Control System) - Monitor(17" LCD) - Step Height Standard(1um) - Manual & Softwares & Cables Technical specification Technology Theory: Optical Lever Performance Vertical Range: 800um Repeatability: 5Å 10 measurements on 0.1um step Scan Length: 30mm(bi-directional) Vertical Resolution: 0.38Å Stage Diameter: 140mm Sample Thickness: 30mm X-Y Stage Translation: 80mm x 20mm X-Y Translation(Manual) Stage Rotation: 360deg manual rotation Max Data Point: 120000 Sampling View: Color CCD Camera Stylus Tip Radius: 2.5um radius Stylus Force Range: 0.03mg~10mg(Programmable) Computer System: Intel Microprocessor with Window XP/Vista Monitor: 17" LCD Monitor Height Standard: 1um Step Height Standard Isolation Hood: Standard on Standard Analytical Software Roughness: Ra Rq Rp Rv Rt Rz Waviness: Wa Wq Wp Wv Wt Wz Step Height: ASH Avg-ht Max.Peak Max.Valley P-Vetc Geometry: Area Slope Radius Perimeter etc Automation: Scan stitching Step detec

박막의 두께를 측정하는 장비로서 0.38Å의 resolution을 갖는다. - Main Body - Computer(Control System) - Monitor(17" LCD) - Step Height Standard(1um) - Manual & Softwares & Cables Technical specification Technology Theory: Optical Lever Performance Vertical Range: 800um Repeatability: 5Å 10 measurements on 0.1um step Scan Length: 30mm(bi-directional) Vertical Resolution: 0.38Å Stage Diameter: 140mm Sample Thickness: 30mm X-Y Stage Translation: 80mm x 20mm X-Y Translation(Manual) Stage Rotation: 360deg manual rotation Max Data Point: 120000 Sampling View: Color CCD Camera Stylus Tip Radius: 2.5um radius Stylus Force Range: 0.03mg~10mg(Programmable) Computer System: Intel Microprocessor with Window XP/Vista Monitor: 17" LCD Monitor Height Standard: 1um Step Height Standard Isolation Hood: Standard on Standard Analytical Software Roughness: Ra Rq Rp Rv Rt Rz Waviness: Wa Wq Wp Wv Wt Wz Step Height: ASH Avg-ht Max.Peak Max.Valley P-Vetc Geometry: Area Slope Radius Perimeter etc Automation: Scan stitching Step detec

박막의 두께를 측정하는 장비로서 0.38Å의 resolution을 갖는다. - Main Body - Computer(Control System) - Monitor(17" LCD) - Step Height Standard(1um) - Manual & Softwares & Cables Technical specification Technology Theory: Optical Lever Performance Vertical Range: 800um Repeatability: 5Å 10 measurements on 0.1um step Scan Length: 30mm(bi-directional) Vertical Resolution: 0.38Å Stage Diameter: 140mm Sample Thickness: 30mm X-Y Stage Translation: 80mm x 20mm X-Y Translation(Manual) Stage Rotation: 360deg manual rotation Max Data Point: 120000 Sampling View: Color CCD Camera Stylus Tip Radius: 2.5um radius Stylus Force Range: 0.03mg~10mg(Programmable) Computer System: Intel Microprocessor with Window XP/Vista Monitor: 17" LCD Monitor Height Standard: 1um Step Height Standard Isolation Hood: Standard on Standard Analytical Software Roughness: Ra Rq Rp Rv Rt Rz Waviness: Wa Wq Wp Wv Wt Wz Step Height: ASH Avg-ht Max.Peak Max.Valley P-Vetc Geometry: Area Slope Radius Perimeter etc Automation: Scan stitching Step detec