초고감도고속검진이 가능한 진단용 센서개발 진공 및 저온 환경에서 I-V C-V를 측정하기 위해 사용됨

* Vacuum Chamber Analyze Triaxial I-V Measure Probing Sys. 1.Vacuum Chamber(MST-5000 Cylindrical Less Than 50fA Leakage Current) : 1set -Vacuum : 10(-3) / -Temp.: (Cooling)-170℃ / (Hot)250℃ -Positioner: 6 Port / -Dimension: Φ300*400(Flange) -6" Al Chuck Ceramic Top: (Condition)10(-3) / (Temp.)-170 to 200℃ -Down Plate 900*850mm Steel Anodizing Embossing Coating 2.Microscope : 1set -Zoom: 0.67-5X / -Total Magnification: Max.220X -CCD Camera C-Mount VelCAM5520 TV Receive Card : 1ea 3.High Positioner Body Unit Vacuum Bellows : 4set -Manipulator LM Lead Guide Micrometer Knob -Resolution: 1um Travel: 40mm Accuracy: 0.1um 4.Positioner Holder(Less Than 1fA Leakage Current) : 4set -Triaxial Cable 2m Triaxial Plug Adaptor 5.Vacuum Chamber Probe Tip-Tip-C-0.5 : 1box 6.Vacuum Rotary Pump(Power:220V 2m Bellows Angle Valve) : 1ea 7.Vibration Table Optic Type(900W*900D*800Hmm) : 1set 8.Air Compressor(6") : 1ea 9.System Control PC&22" LCD Monitor : 1set 10.Sys. Rack(Rack Keyboard Sliding 4Step Ground) : 1set

반도체 소자의 진공 저온 특성 측정 광소자의 온도에 따른 스캐터링 효과 분석