Z-201902125764

* Processing Chamber - Material : SUS 304L - Inner Dimension : 제작사에서 결정 - CF2.75" Gauge & Spare : 5 ea - Single Thickness walled fitted with pipes for cooling all of stainless steel - Chamber Stainless steel shields glass bead blasted for coating protection :　2 set - All of stainless steel electro-polished * Magnetron sputter source - Magnetron rotation type : 3ea * DC Power supply : 2 set - Brand : Advanced Energy in USA - Capacity : 2 KW - Selective processing & including the power switching module - Power Current Voltage mode available - Switching type - Remote type * Performance specification (Processing chamber) - Sample size : Piece to Max. 8 inch - Target composition : Various Metal & Dielectrics - Film thickness Uniformity : < ± 5 % in 6 inch area (min-max) - Ultimate pressure : < 3×10-7 Torr with 3 hours n case of initial pumping - Heating real temp. : Max. 300±3 ℃ - Warranty period : 1 year after installation(except the consumable parts).

스퍼터링 장비에 들가서 칼코켄 이원화합물을 증착하는데 사용되는 스퍼터링 건.(늘어나는 전도체 개발시 탄성체 양끝을 잡아주고 돌리는 도구(전도체코팅용))