TeraCube Scientific은 테라파의 근접장을 측정하는 장비임. 0.1 THz~4 THz의 주파수의 18 cm x 18 cm x 3 mm 3차원 필드 측정 범위를 가지며 100 nm의 분해능으로 측정 가능함. THz near probes의 교체를 통해, x, y, 그리고 z의 electric fields를 각각 측정할 수 있음. 또한 CCD 카메라를 통해, 현재 probe가 측정하고 있는 위치를 실시간으로 보여주어 시료의 결함 등을 측정할 수 있음.

1. THz near field measurement system Specifications: - Usable THz bandwidth up to 4 THz - High-speed imaging at up to 10ms per pixel - Time-domain scanning range: 0 – 1000 ps - Maximum sample size: x = 20 cm, y = 20 cm, z = 1 cm - Maximum scanning range: x = 18 cm, y = 18 cm, z = 3 mm - Minimum bi-directional repeatability: Δx = 0.1μm, Δy = 0.1μm, Δz = 0.15μm Position 1: TeraCube system 4D THz near-field scanning system for operation with existing optical table on customer site. The system contains besides other parts the following components: - 90 cm x 90 cm footprint base-plate - 3D scanning-stage with 20 cm x 20 cm x 5 mm travel and sample table - Time-delay stage - Optical height/distance sensor - CCD camera module - Bias-free broadband THz emitter (TeraBlast) - Opto-mechanical chopper - Lock-in amplifier - Transimpedance amplifier - Internal optics e.g. mirrors, lenses and variable beamsplitter - Electronics for stage movement, data acquisition and system control - PC system with pre-installed control software - System housing Position 2: System control and automation software License fee for Protemics proprietary system measurement and control software. Position 3: Software extension for advanced data analysis Dedicated TeraCube Data Analysis Software package extension including - Measurement data import, filtering and export (ASCII format), - Data plot generation and editing - Frequency-domain data conversion of time-domain single-point transients- ents and 2D imaging data Data statistics and graphical data analysis tools Position 4: Set of 5 TeraSpike near-field probes Set of 5 microprobes from TD-800-X or TD-800-Z series Position 5: Femtosecond fiber laser Wavelength: 780 nm Pulse width: < 100fs Output power: > 140 mW Repetition rate: 80 MHz

THz near-field measurements at: Metamaterials Plasmonic structures Passive devices: resonators, antennas etc. Emitters Waveguides Sensor surfaces Analysis and inspection of: Transparent conductors based on ITO or emerging non-ITO materials as used for Flexible or curved touch sensors and displays OLEDs (Thin-film) solar cell Smart windows EM shielding Semiconductor doping layers Metal-mesh layers Silver nanowire coatings PEDOT:PSS Flexible electronics Graphene and carbon nanotube layers Thin-film metals

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